• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The present invention relates to a method of three-dimensional characterization of an object (5), comprising: - acquisition of distance data on two different measurement planes (81, 82), by at least three interferometric distance sensors (71); , 72) per measuring plane and for several values of rotation of the object about an axis of rotation (4); and for each measurement plane, obtaining data representative of a contour line (14) of the object from the distance data; for one of the measurement planes, an acquisition by an image sensor (151) of a three-dimensional image of a face of the object (5) and a reiteration of this image acquisition for several values of rotating the object (5) around its axis of rotation (4); and an assembly of different three-dimensional images acquired for this measurement plane (81), so as to obtain three-dimensional data of a contour surface of the object, the assembly comprising a definition of relative positions of the different images by means of the data representative of the contour line (14) contained in this measurement plane (81).
    公开号:FR3028940A1
    申请号:FR1461310
    申请日:2014-11-21
    公开日:2016-05-27
    发明作者:Stefan Kubsky；Alain Lestrade；Nicolas Jobert；Christer Engblom；Filipe Alves
    申请人:Synchrotron Soleil；
    IPC主号:
    专利说明:

    [0001] FIELD OF THE INVENTION The present invention relates to a method for the three-dimensional characterization of a surface of an object. It also relates to a device implementing this method. Such a device or method may allow for example a user to perform a topography or a three-dimensional characterization of a surface of an object at a nanometric resolution, with independent and simultaneous characterization of its rotating support. The field of the invention is more particularly but in a nonlimiting manner that of the characterization of the surface of an object typically with a resolution in height of less than 10 nm and / or the characterization of the surface of an object intended to be placed precisely in intersection with a beam of radiation (corpuscular or electromagnetic). STATE OF THE PRIOR ART Many technologies are known for characterizing the surface of an object in three dimensions: interferometry, capacitive sensors, laser telemetry, etc. The current problem with all these technologies is that they all have a defect and that we can not find an ideal compromise between: - the coverage of the characterization, the spatial resolution of the characterization, - the speed at which the characterization is carried out, the budget implemented. The object of the present solution is to provide a device and a method of three-dimensional characterization of a surface of an object allowing: a wide coverage of the characterization of the object (preferably 360 ° around the object), and a good spatial resolution of the characterization (preferably less than 10 nm), and a good speed at which the characterization is carried out (preferably 30 minutes or less), all this simultaneously, and while limiting as much as possible the budget implemented. DISCLOSURE OF THE INVENTION This object is achieved with a method of three-dimensional characterization of an object, comprising: - a supply of the object, - an acquisition of distance data comprising: o for at least two measurement plans each measuring plane being equipped with at least three distance sensors surrounding the object, and o for each distance sensor of each measurement plane, a measurement of a distance data representative of a distance between a outer surface of the object and this distance sensor measured in the measuring plane of the sensor, - a reiteration of the acquisition of distance data for several values of rotation of the object about an axis of rotation relative to to a distance reference system in which the distance sensors are fixed, - for each measurement plane, obtaining data representative of a contour line of the object from the distance data measured by t or the sensors of this measurement plane and for different values of rotation of the object around its axis of rotation, the contour line being contained in this measurement plane, (said obtaining of data representative of a contour line preferably comprising taking into account a variation of inclination and / or translation of the axis of rotation in the distance reference system during acquisition of the distance data), for each measurement plane from among at least one of the measurement planes, an acquisition by an image sensor of a three-dimensional image of a face of the object, this measurement plane being imaged on this three-dimensional image, and a reiteration of this acquisition of image for several values of rotation of the object about its axis of rotation facing this image sensor in an image frame in which the image sensor is fixed, - for each measurement plane having made the tridim image acquisition object 3, an assembly of different three-dimensional images acquired for this measurement plane, so as to obtain three-dimensional data of a contour surface of the object, the assembly comprising a definition of relative positions of the different images by means of the data. representative of the contour line contained in this measurement plane. The definition of the relative positions of the three-dimensional images 20 may comprise, for each three-dimensional image of a measurement plane, a least squares algorithm minimizing a difference between: the data representative of the contour line of the object contained in this plan of measurement, and - this three-dimensional image of this measurement plan.
    [0002] The method according to the invention may comprise, before the assembly of the different three-dimensional images, an orientation of each three-dimensional image with respect to the other three-dimensional images, this orientation being determined as a function of a variation of inclination of the object by report to the image repository when acquiring these 30 different three-dimensional images. The object may extend along an axis of elongation, the axis of elongation and the axis of rotation preferably forming an angle less than 0.01 radian, still more preferably less than or equal to 0.005 radian. The object can be mounted on a thermally stabilized support and rotatably mounted about the axis of rotation, the method preferably further comprising a verification of the stabilization of a temperature of the object with variations. temperature below a temperature difference threshold. Each image sensor may comprise a white light interferometer and / or a focus contrast microscope. The distance sensors may be interferometric sensors and the distance data are interferometric data. The distance sensors and the image sensor are preferably integral with the same frame, the object being mounted on a displacement plate arranged for the rotation of the object about the axis of rotation relative to this frame. .
    [0003] According to yet another aspect of the invention, there is provided a characterization device, comprising: an object area, means for acquiring distance data, said distance data acquiring means being distributed over at least one object area; at least two separate measuring planes, each measuring plane being equipped with at least three distance sensors surrounding the object area, each distance sensor being arranged to measure in its measurement plane a distance data representative of a distance between: - an outer surface of an object disposed in the object area being integral with the object area and - this distance sensor and this for different values of rotation of the object area around a axis of rotation with respect to a distance reference system in which the distance sensors are fixed, for each measurement plane, means for obtaining data representative of a contour line of the object from acquired distance data comprising distance data measured by all the sensors of this measurement plane and for different rotational values of the object area about its axis of rotation, this contour line being contained in this measuring plane (the means for obtaining data representative of a contour line being preferably arranged to take into account a variation of inclination and / or translation of the axis of rotation in the reference frame of distance during acquisition of the distance data), for each measurement plane among at least one of the measurement planes, an image sensor arranged to acquire a three-dimensional image of a face of the object disposed in the area of object, this measurement plane being imaged on this three-dimensional image, the image sensor being arranged to reiterate the image acquisition for several values of rotation of the object area around its axis of rotation in front of it. image sensor in an image frame in which the image sensor is fixed, for each measurement plane among at least one of the measurement planes, means for assembling different three-dimensional images acquired for this measurement plane, in order to obtain three-dimensional data of a contour surface of the object, the assembly means being arranged to define the relative positions of the different images by means of the data representative of the contour line contained in this measurement plane. The assembly means may be arranged so that the definition of the relative positions of the three-dimensional images comprises, for each three-dimensional image of a measurement plane, a least squares algorithm minimizing a difference between: the data representative of the contour line of the object contained in this measurement plane, and this three-dimensional image of this measurement plane. The device according to the invention may comprise means arranged to, before assembling different three-dimensional images, orienting each three-dimensional image with respect to the other three-dimensional images as a function of a variation of inclination of the object zone with respect to the image repository when acquiring these different three-dimensional images. The device according to the invention may comprise a support for the object zone, said support being mounted in rotation about the axis of rotation, said support comprising thermal stabilization means, the device preferably comprising in addition, means for verifying the stabilization of a temperature of the object zone with variations in temperature below a threshold of temperature difference. Each image sensor may comprise a white light interferometer and / or a focus contrast microscope.
    [0004] The distance sensors are preferably interferometric sensors and the distance data are preferably interferometric data. The distance sensors and the image sensor are preferably integral with the same frame, the object zone being mounted on a displacement plate arranged for the rotation of the object zone around the axis of rotation. compared to this frame. DESCRIPTION OF THE FIGURES AND EMBODIMENTS Other advantages and particularities of the invention will appear on reading the detailed description of implementations and embodiments that are in no way limitative, and the following appended drawings: FIG. In a side view of a first embodiment of device 1 according to the invention, which is the preferred embodiment of the invention, - Figure 2 is a top view of the device 1 according to the invention, - the FIG. 3 is a side view of the support 3 located in the center of the device 1 according to the invention, this support 3 comprising microdisplacement plates in translation and in rotation, and carrying an object 5 to be characterized, - FIG. contour line of the object 5 in a measurement plane 81 or 82 viewed from above, - Figure 5 illustrates an example of an object 5 to be characterized and the positions of the two measurement planes 81, 82 and image sensors 15, 151, 152 compared to this object 5, FIG. 6 is a top view of the object 5 and several images 191 to 196 acquired by the image sensor 151 or 152, FIG. 7 illustrates the image 191. "Top view" acquired by the image sensor 151 or 152, - 8 shows the image 191 "front view" acquired by the image sensor 151 or 152, - Figure 9 illustrates the image 192 "top view" acquired by the image sensor 151 or 152, - Figure 10 illustrates the image 192 "front view" acquired by the image sensor 151 or 152, - Figure 11 illustrates the assembly of the images 191 and 192, - Figure 12 illustrates different positions 38, 39 of the object 5 in rotation about the axis of rotation 4, for a first position of the positioning plates 35, 36 of Figure 3, and FIG. 13 illustrates different positions 40, 41 of the object 5 rotating about the axis of rotation 4, for a second position of the positioning plates 35, 36 of FIG. 3. These embodiments being in no way limiting, it will be possible to consider in particular variants of the invention comprising only a selection of characteristics described or illustrated subsequently isolated from the other characteristics described or illustrated (even if this selection is isolated within a sentence including these other features), if this selection of features is sufficient to confer a technical advantage or to differentiate the invention from the state of the art. This selection comprises at least one preferably functional feature without structural details, and / or with only a portion of the structural details if this portion alone is sufficient to confer a technical advantage or to differentiate the invention from the state of the art. prior art. A preferred embodiment of device 1 according to the invention will now be described, with reference to FIGS. 1 to 13, for characterizing an object in three dimensions. The device 1 consists of an advantageous combination of optical and optical methods. digital devices: a circular device carrying a certain number of interferometric sensors 7 arranged in two levels 81, 82 distant by a few millimeters, at the rate of at least three sensors 7 per level, plus a measurement of height (by a height sensor 25 ), has been conceived. At the center of this device 1 is a nano positioning support or system 3 with: - three linear axes (XYZ), - a rotation means 31 in the horizontal plane and 10 - a horizontal XY linear stage, the support 3 carrying a assembly consisting of: - a sample holder object, and - a sample 23 carried by the object 5, this assembly being mounted on the rotation means 31 about an axis 4.
    [0005] In this configuration the interferometric sensors 7 can scan the surface of the assembly 5, 23 angularly step-by-step. They can further measure the convolution between the shape of the assembly 5, 23 and the errors of the rotation. In order to improve the accuracy and to be able to really model the assembly, even for non-reflective samples 23, two optical methods are used in a complementary manner in the same circular device: at least one sensor 15 comprising a white light interferometer (WLI) ) and a focus contrast microscope, the latter being adapted to the structured but non-reflective samples 23. These two optical methods are integrated in an assembly that resembles an optical microscope. Other complementary methods, such as for example the nano-GPS (Horiba Jobin-Yvon), are integrable in the device 1 as well as in the data processing process. The various sensors 7, 15 make it possible to map the assembly 5, 23. It is, however, necessary to deconvolve the contributions coming from the (reproducible and non-reproducible) geometric errors of the rotation (about the axis 4). of those which are fixed and which represent the external form of the assembly 5, 23. By this approach we come to describe numerically a) the assembly 5, 23 and b) the errors of the rotation means 31. In more detail, the device 1 comprises an object zone 2. This object zone is situated approximately in the center of the device 1. The device 1 comprises the support 3 for the object zone. The object zone 2 is arranged to receive the object 5 so that this object 5 is in contact and integral with the support 3. The support 3 is rotatably mounted around the axis of rotation 4.
    [0006] The support 3 (illustrated in FIG. 3) comprises the rotation means 31 which is a plate 31 of rotation around the axis 4, of Smaract reference model SR2812 and of angular pitch less than or equal to 0.018 radians. The support 3 comprises: A plate 32 of displacement along a horizontal axis X, AEROTECH reference model ANT95 and having a step of lnm, A plate 33 of displacement along a horizontal axis Y perpendicular to the axis X, reference Physikalische Instrumente (PI) model LPS65 and having a pitch of 1nm, 20 - A plate 34 of displacement along a vertical axis Z perpendicular to the X and Y axes, reference Physikalische Instrumente (PI) model LPS65 and having a pitch of 1nm, - A platinum 35 of displacement along the horizontal axis X, reference Smaract model SLC1720 and having a pitch of 1nm, and 25 located between the means of rotation 31 and the zone 2 or the object 5, - A plate 36 of displacement according to the horizontal axis Y perpendicular to the X axis, Smaract reference model SLC1720 and having a pitch of lnm, and located between the rotation means 31 and the zone 2 or the object 5.
    [0007] The support 3 (and the frame 17) is provided with thermal stabilization means, comprising for example several heating elements. Each heating element is for example a heating sheet 60x47mm2 (brand: THERMO, name Thermo Folien Heizung60X47). Each heating element is placed closest to a heat source which is associated among the integrated optical sensors as well as the motors of the plates 31 to 36, and this heating element heats only when the heat source to which it is associated does not work or does not heat above a certain threshold.
    [0008] The device 1 comprises means 6 for acquiring distance data comprising several sensors 7. The means 6 for acquiring distance data are distributed over at least two separate measurement planes 81 and 82. Two neighboring measurement plans 81, 825 are typically spaced along the Z axis by a distance of between 3 and 6 millimeters. Whatever their number, the measurement plans 81, 82 are parallel. Each plane 81, 82 is parallel to the X and Y axes. The axis of rotation 4 is substantially vertical.
    [0009] Each measurement plane 81, 82 is horizontal. Each measurement plane 81 or 82 is substantially perpendicular to the axis of rotation 4. More exactly, the axis of rotation 4 is and remains substantially perpendicular to each measurement plane 81, 82 at plus or minus 10 milli radians.
    [0010] Each measuring plane 81, 82 is equipped with at least three (preferably at least four) distance sensors (referenced 71 for the plane 81 and 72 for the plane 82) surrounding the object zone 2. Each sensor distance (respectively 71 or 72) is arranged to measure (by interferometry) in its measuring plane (respectively 81 or 82) a distance data representative of a distance contained in this plane (respectively 81 or 82) between: - an outer surface of the object 5 disposed in the object zone 2 being integral with the object zone 2, and - this distance sensor (respectively 71 or 72) 30 and this for different values of rotation of the zone object 2 and therefore the object 5 around the axis of rotation 4 relative to a distance reference 9 (defined by the orthogonal axes X, Y and Z) in which the distance sensors 71 and 72 are fixed . In other words, each sensor 71 or 72 measures the distance between itself and the outer surface of the object 5 in its measuring plane 81 or 82. Each sensor 7 of distance is a "point" sensor or 5 unidirectional, providing not information with two or three spatial dimensions, but information according to only a spatial dimension, more exactly a distance between an outer surface of the object 5 and this distance sensor 7. Each sensor 7 has a spatial resolution for this measure of distance (between an outer surface of the object 5 and this distance sensor) less than 10 nm, ideally less than 1 nm. Each sensor 7 comprises an interferometer comprising: a "passive" (focusing-focus) head "standard Attocube" for the lower measurement plane 82 and "Attocube flexure head" 15 for the upper measurement plane 81, and a FPS3010 unit (unit control) of the Attocube brand connected to the "passive" head by an optical fiber. Each sensor 7 has an integration diameter (typically spot size for the interferometric measurement) on the object 5 typically less than 100pm. The distance sensors 7, 71, 72 are interferometric sensors (typically in the infrared) and the distance data are interferometric data. The device 1 comprises calculation and control means 10.
    [0011] The means 10 are technical means, and comprise at least one computer, a central or calculation unit, an analog electronic circuit (preferably dedicated), a digital electronic circuit (preferably dedicated), and / or a microprocessor (of dedicated preference), and / or software means. In more detail, the means 10 comprise a computer 26 equipped with a graphics card 37. The device 1 comprises, for each measuring plane (respectively 81 or 82), means 11 for obtaining data representative of a line contour 14 of the object 5 from distance data acquired by the means 6, these data comprising distance data measured by all the sensors (respectively 71 or 72) of this measurement plane (respectively 81). or 82) and for different values of rotation of the object zone 2 and thus of the object 5 about its axis of rotation 4. This contour line 14 (illustrated in FIG. 4) is contained in this plane of rotation. measuring (respectively 81 or 82), and delimits all or part of the outer surface of the object 5 in this measurement plane (respectively 81 or 82). The contour line 14 in the plane 81 or 82 is preferably a closed loop all around the object 5 at 360 ° around the axis 4, but may in a more limited version follow only a 10 part of interest of the outer surface of the object 5 in the plane 81 or 82. The means 11 typically comprise the means 10 for calculation and control. The means 11 for obtaining data representative of a contour line 14 are arranged to take into account a variation of inclination and / or translation of the axis of rotation 4 (or of the object 5). or zone 2) in the distance repository 9 during the acquisition of the distance data, in particular during the rotation of the zone 2 or the object 5 around the axis 4. This variation of inclination and / or translation in the distance reference 9 is due to the imperfections of the rotation means 31 typically at the nanometer scale or a few nanometers. The inclination variation of the axis of rotation 4 in the distance frame 9 preferably has an amplitude less than 5 pradians for a group of N distance measurements by a sensor 71 or 72.
    [0012] The translation variation of the axis of rotation 4 in the distance reference 9 preferably has an amplitude of less than 10 micrometers for a group of N distance measurements by a sensor 71 or 72. The device 1 comprises, for each plane measuring (respectively 81 or 82) among at least one of the measuring planes, an image sensor 15 (respectively 151 or 152) arranged to acquire a three-dimensional image 191 of a face of the object 5, this plane of measurement (respectively 81 or 82) being imaged on this three-dimensional image, the image sensor (respectively 151 or 152) being arranged to reiterate the three-dimensional image acquisition 192 to 196 for several values of 3028940 -13- rotation of the object zone 2 and thus of the object 5 around its axis of rotation 4 facing this image sensor (respectively 151 or 152) in an image frame 16 in which the image sensor (respectively 151 or 152) is fixed.
    [0013] Each image sensor 151, 152 comprises: - a white light interferometer (WLI) of reference GBS Ilmenau "Smart WLI" whose input optics facing the object 5 is modified to have a long distance of approximately 20 mm, and - a Phaseview brand focus microscope with a Zeescan model. According to the embodiment, the device 1 may comprise (as illustrated in FIG. 5): - only a fixed image sensor 151 for the plane 81, or - Only an image sensor 152 fixed for the plane 82, or An image sensor 15 movable along the axis Z with respect to the object 5 for at least two positions along the axis Z corresponding to the planes 81 and 82, this sensor 15 playing the role of the two sensors 151 and 152; in this case, to move the sensor 15 relative to the object 5 along the Z axis, the object 5 is moved by means of the plate 34 and the position of the object 5 is controlled by means of the interferometric sensor 25 of height which targets the object 5; or - a fixed image sensor 151 for the plane 81 and a fixed image sensor 152 for the plane 82 and distinct from the sensor 151.
    [0014] The distance sensors 7, 71, 72 and each image sensor 151, 152 are integral with the same frame 17 and preferably stationary. The repositories of distance 9 and image 16 are merged. The object zone 2 or the object 5 is thus mounted on the rotation means 31 which is arranged for the rotation of the object zone 2 or the object 30 around the axis of rotation 4 relative to 17. The frame 17 is for example made of stainless steel 1 to 5 cm thick. The device 1 further comprises means for verifying the stabilization of a temperature of the object zone 2 with variations below a threshold of temperature difference ΔT. AT is preferably less than or equal to one milli Kelvin. These means for verifying the temperature stabilization typically comprise several NTC sensors of EPCOS thermistor type S861 / 5k / F40 (manufacturer's reference B578S502 / F / 040), the position of each of which is referenced 27, 28 or 29: Three sensors 27 on the frame 17 in the "low" position (large thickness of the frame 17 and thermal leakage of the "ground") Three sensors 28 on the frame 17 in the "high" position (low thickness of the frame 17) - Four sensors 29 3. If each sensor 27, 28, 29 has a measured temperature stable to a milli Kelvin, then it is considered that the zone 2 and the object 5 have a temperature possibly different from the measuring points of the sensors 15 27, 28, but which is also stable to the nearest milli Kelvin. Each sensor 27, 28, 29 is arranged to verify a temperature stability between Tref-AT and Tref + AT (the reference temperature Tref may vary according to the measurement point, that is to say according to the sensor 27, 28, 29). Each temperature sensor may have a reference temperature different from that of the other temperature sensors. The reference temperature of each temperature sensor can be defined as the temperature measured by this temperature sensor at the beginning of a series of acquisition of distance data by the sensors 7 and images by the sensor 151 and / or 152. .
    [0015] Preferably, the device 1 thus comprises means for verifying the stabilization of the temperature gradients between several temperature measurement points (on the device 1) below a threshold of temperature difference ΔT (typically equal to 1 mK). The device 1 comprises means 12 for, before assembling 30 different three-dimensional images 191 to 196 acquired by the sensor 151 or 152, orienting (typically in the image reference 16) each three-dimensional image with respect to the other three-dimensional images to which it must be assembled, this orientation being carried out as a function of a variation of inclination of the object zone 2 or the object 5 by comparison with the image reference 16 during the acquisition of these different three-dimensional images 191 to 196, in particular during the rotation of the zone 2 or the object 5 around the axis 4. This variation of inclination is defined according to two angles around two perpendicular axes, these two 5 axes (illustrated in FIG. 11) comprising the optical axis 21 (parallel to the plane respectively 81 or 82) of the image sensor (respectively 151 or 152) having taken these images 191 to 196 and an axis 22 perpendicular to this axis opti 21. The means 12 typically comprise the calculation and control means 10. The device 1 comprises, for each measuring plane (respectively 81 or 82) among at least one of the measurement planes, means 13 for assembling various three-dimensional images 191 to 196 acquired (by the sensor respectively 151 or 152) for this plane of measurement. Measuring (respectively 81 or 82), so as to obtain three-dimensional data of a contour surface 18 (illustrated in FIG. 6) of the object 5, the assembly means being arranged to define the relative positions of the different images 191 to 196 by means of the data representative of the contour line 14 contained in this measurement plane 20 (respectively 81 or 82). The contour surface 18 is preferably a closed "ribbon" surface all around the object 5 at 360 ° around the axis 4, but may in a more limited version follow only a part of interest the outer surface of the object 5. The means 13 typically comprise the means 10 for calculation and control. The assembly means 13 are arranged so that the definition of the relative positions of the three-dimensional images comprises, for each three-dimensional image of a measurement plane (respectively 81 or 82), a least squares algorithm minimizing a difference between: representative of the contour line 14 of the object contained in this measurement plane (respectively 81 or 82), and this three-dimensional image of this measurement plane (respectively 81 or 82). A method according to the invention of three-dimensional characterization of the object 5 implemented by the device 1 will now be described, again with reference to FIGS. 1 to 13.
    [0016] Delivery of the object This method firstly comprises a supply of the object 5 within the device 1. Each contour line 14 and each contour surface 18 is preferably a contour line or a contour surface. of a part 10 of interest of the object 5, this part of interest having a shape that can be modeled by cylindrical coordinates (r, cp, z) around an axis of elongation 20 of the object 5 , so that for this part of interest, for each given height z along the axis of elongation 20 and for each given angle cp about the axis of elongation in a plane perpendicular to this axis 15 of 20, there is only one possible value of radius r between the axis of elongation 20 and the outer surface of the object 5. This object 5 has a portion preferably having almost (ie to some micrometric variations near) a cylindrical shape of radius ro extending along the substantially parallel axis of elongation 20 The axis of revolution of this cylinder and the axis of rotation 4 are substantially coincident with a few imperfections of alignment. The portion of the object 5 having a substantially cylindrical shape is preferably a brass cylinder (height 10 to 50 millimeters, diameter 3 to 20 millimeters). The object 5 carries at its apex a sample 23 intended to be placed later in intersection with a beam of radiation (corpuscular or electromagnetic). The object 5 extends along the axis of elongation 20 (which here corresponds to an axis of revolution of the cylinder of radius ro), the axis of elongation 20 and the axis of rotation 4 forming a angle less than 0.01 radian, even more preferably less than or equal to 0.005 radian. 3028940 -17- Checking the temperature. The object 5 is mounted on the support 3 thermally stabilized and rotatably mounted about the axis of rotation4. This method comprises a verification (by the verification means 5 of the temperature stabilization 27, 28, 29) of the stabilization of a temperature of the object 5 with variations below a threshold of temperature difference (1mK) during all the steps of acquisition of distance data and three-dimensional image acquisition. These temperature stabilization checking means typically comprise a plurality of temperature sensors 27, 28, 29 (a temperature sensor per measuring point) as previously described. There may be temperature gradients between the different temperature sensors, which will then be the stability of these gradients below a variation of one milliKelvin during all 15 steps of distance data acquisition. acquisition of three-dimensional images. Preferably, the method therefore comprises a verification of the stability of the temperature gradients between several temperature measurement points of the device 1 below a threshold of temperature difference ΔT. Aligning the object 5 (and its axis of elongation) with the axis of rotation 4. To match as much as possible the axis of elongation 20 of the object 5 and the axis of rotation 4 of the means of rotation 31, the device 1 comprises means 24 for measuring the position of the object 5 relative to the axis 4 of the rotation means 31, this position being adjusted by the translation means 35 and 36 to minimize the distance ( preferably less than 100 nm) between the axis of elongation 20 of the object 5 and the axis of rotation 4 of the rotation means 31.
    [0017] The measuring means 24 comprise an LS-9000 reference apparatus from KeyEnce. The measuring means 24 are located below the level of the planes 81 and 82 so as not to hinder the measurements in these planes 81, 82 by the sensors 7, 151, 152. Thereafter, the portion of the cylinder of the object 5 measured by the sensors 71 or 72 is assumed centered on the axis of rotation 4 (offset between the axes 4 and 20 almost zero): this is obtained in a fine way by making a first series of distance measurements by the sensors 71 or 72 and 5 minimizing the first order harmonic of the Fourier decomposition of the corresponding sensor readings 71 or 72. Acquisition of distance data. This method then comprises an acquisition (by the means 6) of distance data comprising: for at least two separate measuring planes 81 and 82, each measuring plane (respectively 81 or 82) being equipped with at least three sensors distance (respectively 71 or 72) surrounding the object 5, and - for each distance sensor (respectively 71 or 72) of each measuring plane (respectively 81 or 82), a measurement (by interferometry) of a given distance representative of a distance (contained in this plane respectively 81 or 82) between an outer surface of the object 5 and the distance sensor measured in the measurement plane of this sensor (respectively 71 or 72).
    [0018] This method comprises a reiteration of the distance data acquisition for several rotation values of the object 5 about the axis of rotation 4 relative to the distance repository 9 in which the distance sensors 71 and 72 are fixed. . At each iteration, the distance data are measured simultaneously on all measuring planes 81 and 82 and for all the sensors 7 of these measuring planes. The spot of each interferometer 7 on the object 5 typically moves at an average speed (continuous or discontinuous) of the order of 100 dam. s-1. The data acquired by the sensors 7 are denoted shjt () with: 30 - S, a distance (typically in nm) - QE [0.2n1 in radians, rotation angle of the object 5 around 22 "r of the axis The number of measuring points (ie the number of iterations), N being preferably an even integer and preferably a power of 2, and being typically equal to hundred or a few hundred (typically between 100 and 300) for an object 5 whose quasi-cylindrical portion has a diameter of about 3 millimeters and with each sensor 7 having an integration diameter of about 100 micrometers ( or less), - k E [1,41, a positive integer corresponding to the number of the sensor within its plane 81 or 82 10 - h E iz1lZ21 the two measurement heights on object 5 (in pm) sh, k (g) i is the distance, contained in the measurement plane 81 (h = z1) or 82 (h = z2) located at the height h along the Z axis, between: - the outer surface of the object 5, and the sensor No. k of the measurement plane 81 (h = z1) or 82 (h = z2) located at the height h along the axis Z for the angular position cp of the object 5 around its axis of rotation 4. However, in general, a datum of distance sh ((I)) is not necessarily in nm, but may for example be an interferometric datum in arbitrary unit and proportional to this distance.
    [0019] Each measurement plane 81 or 82 is defined by its height h along the Z axis, with h = z1 for the measurement plane 81 or h = z2 for the measurement plane h = z2. For each height measurement plane h, each sensor 7 is defined by its number k.
    [0020] The object 5 is defined by its angular position cp about its axis of rotation 4 at the time of a measurement of distance data. Obtaining data representative of the contour line 14. This method comprises, for each measuring plane (respectively 81 or 82), obtaining (by means 11) data representative of the contour line 14 of the object 5 from the distance data measured by all the sensors (respectively 71 or 72) of this measurement plane (respectively 81 or 82) and for different rotation values cp of the object 5 around its axis of rotation. rotation 4, the contour line 14 being contained in this measuring plane (respectively 71 or 72), said obtaining of data including taking into account a variation of inclination and / or translation of the axis of rotation 4 (or object 5 or zone 2) in the distance repository 9 during the acquisition of the distance data and in particular during the rotation of the zone 2 or the object 5 around the axis 4, that is to say between the different iterations of the data acquisition of di stanzas.
    [0021] The following steps describe the circularity measurement procedure (or obtaining the contour line 14) of the object 5 at each of the levels h = and h = Z taking into account the variation of inclination and / or of translation of the axis of rotation 4 (or object 5 or zone 2) in the distance reference 9 during the rotation of the zone 2 or the object 15 around the axis 4. We omit from here the index h, considering that the description which follows is applicable to the case h = z1 for the measurement plane 81 or h = z2 for the measurement plane h = z2. To obtain data representative of the contour line 14 of the object 5 in a measurement plane (respectively 81 or 82), it is necessary to use a series of distance measurements in this measurement plane (respectively 81 or 82) which were measured while the position of the axis of rotation 4 was centered relative to the object 5 in this plane 81 or 82: Figure 12 illustrates the position of the axis of rotation 4 relative to the object For the measurements by the sensors 71 in the plane 81; This configuration is obtained by making one or more series (s) of distance measurements by the sensors 71 with a rotation of the object 5 around its axis 4 and minimizing the first order harmonic of the Fourier decomposition sensor readings 71; and FIG. 13 illustrates the position of the axis of rotation 4 with respect to the object 5 for measurements by the sensors 72 in the plane 82; this configuration is obtained by making one or more series (s) of distance measurements by the sensors 72 with a rotation of the object 5 around its axis 4 and minimizing the harmonic of order 1 of the Fourier decomposition of the sensor readings 72. At each rotation step f, each sensor 7 of a measuring plane 81 or 82 sees: The components x (cp) and x- (v) of the displacement of the axis of rotation 4 in this measurement plane The variation of radius dr (9) of the quasi-cylindrical part of the object 5.
    [0022] The general equation of sensor readings 7 is: Sk (9) = X (CP). COS Vk + Y (49). SillVk CIT4 (Pk) cpk being the angular position of each sensor k (71 or 72) around the axis of rotation 4 in the reference 9 or 16, this angular position cpk does not vary during the rotation of the object 5 around the axis 4. The solution (y 'dr) of this equation passes through the Fourier transform: Skn sk (9) = X. a system Cos E [1, N1 C (g3) .cOs ( pk + domain TE 25 with = k harmonic We obtain Ti Pk Yn, sin vk X 'frequencies for each Sin S2 n of linear equations in the Yn dR' - - - n: Skn COS fi sin (pi COS (f) 2 sin ço2 E'-in {P2 COS (pk sin q) k Qk Which is written by matrix: 30 = 1112 - k'71 This is solved by the least squares for each harmonic n: 3028940 - 22- Xn = En. 511 with jirt an estimator from where P'ein ffn is the normal matrix and En = - gr, is the residual error We choose the angles ek to avoid a loss of harmonic to the order n according to the following criterion : Det (Nii) # 0, V n Concretely, the 9k have values fixed in the device 1 which do not vary and remain the same during the rotation of the object 5 about the axis 4. In practice, it is preferable: 10 cpi = 0.00000 radians (1) 2 = 0.95720 radians (1 ) = 2.35619 radians (p4 = 3.60792 radians We will try to minimize ek by varying the tek: 15 erk cep) TF gn residual error in the spatial domain. f (.9) in the angular domain (-19k min (êk) Then, the resolution algorithm is as follows: Choice of nominal q3k 20 Fourier Transform of k sensor readings 7: SkVP) Start loop optimization: on varies the 92re to have 25 minimum, where o- is the centered standard deviation of For each harmonic n: - Calculation of the matrix 1-4 = - Calculation of the coefficients Xn = H - Calculation of the residual error in the frequency domain = 3028940 -23- - Construction of the vector whose components are the E with n E 2, .., N- ± 1 and E is a Fourier Transform (TF) of a hermitian signal èk op). - Calculation of the residual error in the spatial domain 5 - Calculation of the standard deviation of - End of the optimization loop Calculation of the coefficients: Yln Hn - 1-4-, T. g, definitive - Construction of the vector g whose components are the 10 with ne 2 s / 12 1- 1 and X is a TF of a Hermitian signal ((pl - Calculation of the solution in the spatial domain The computation of the polar coordinates points Pc of object 5 for each level h (i.e., contour line 14 in the height measurement plane h) is then: + dr (9) fic, = tp with 7 -, the nominal radius of the substantially cylindrical part of the object 5 and dr the deviations of the outer surface of this quasi-cylindrical portion relative to this nominal radius.
    [0023] Thus, according to the invention, it can be seen that the difference between: the variation of the distance between a sensor 7 and the surface of the object 5 due to a variation of this surface, and the variation of the distance between a sensor 7 and the surface of the object 5 due to a variation of position of the axis of rotation 4 of the object 5. Comparing, for data acquired at the same moment, the variations of position of the axis of rotation 4 of the object 5 for two separate measurement planes 81 and 82, it is furthermore possible to say whether this variation of position is a variation of position by translation or by rotation: for example, if during a time interval between two measurements by the sensors 7, the axis of rotation 4 moves in the plane 81, but not in the plane 82, there is a rotation of the axis 4 around a axis perpendicular to the axis 4 and passing through the plane 82, and 10 - for example, if during a time interval between two measurement s by the sensors 7, the axis of rotation 4 moves exactly the distance and in the same direction in the planes 81 and 82, there is only a translation of the axis 4. It is further noted that the separation between The variation of the distance between a sensor 7 and the surface of the object 5 due to a variation of this surface, and the variation of the distance between a sensor 7 and the surface of the object 5 due to a variation of position of the axis of rotation 4 of the object 5, 20 is achievable with only three sensors 7 per measurement plane 81 or 82, as for example also described in the document CN103363921A. Acquisition of three-dimensional images 191 to 196 This method comprises, for each plane (respectively 81 or 82) of measurement among at least one of the measurement planes, an acquisition by the image sensor (respectively 151 or 152) of a three-dimensional image 191 of a face of the object 5, this measurement plane being imaged on this three-dimensional image 191, and a reiteration of this image acquisition 192 to 196 for several rotation values of the object 30 around its axis of rotation 4 facing this image sensor (respectively 151 or 152) in the image frame 16 in which the image sensor (respectively 151 or 152) is fixed. Each three-dimensional image 191 to 196 may further image all or part of a face of the sample 23 carried by the object 5. Within the image sensor 151 or 152, use is made of: the white light interferometer for a reflective object and / or sample 23, and the focus contrast microscope for a structured but non-reflective object 5 and / or sample 23. The data of each three-dimensional image 191 to 196 number m for the measurement plane located at height h are in the form of tables Ihen {consisting of points or pixels fi defined by fi -, with: VV, a scalar (in nm) 10 (e, 0- the coordinates of the pixel in the local system of the image and whose origin is the center of the image 2 ir -mTri, with the integer m E [0 - 1], (pm being the the angle of rotation of the object 5 at the setting of the image hm by the image sensor at the height h (sensor 151 for h = z1 and sensor 152 for h = z2), M-1 being the number of images taken by this image sensor in all, M-1 being typically equal to a few tens (typically between 20 and 30) for a quasi-cylindrical portion of the object 5 having about 3 millimeters in diameter and with each 20 image having a width of about 500 micrometers, only six images are shown in Figure 6 to not overload, E (zDz2) the two measurement heights on the object 5, the c oordered (ie, 0 are assumed in 25 metric dimensions. They are calculated according to the sensor field (respectively 151 or 152), the number and the size of the pixels. The width of each three-dimensional image 191 to 196 along its coordinate c is typically between 100 μm and 1000 μm, typically 500 μm. The width of each three-dimensional image 191 to 196 along its I coordinate is typically between 100 μm and 1000 μm, typically 300 μm. The lateral spatial resolution of each three-dimensional image 191 to 196 along its coordinate c (in the plane of Figures 7 to 10) is less than or equal to 10 μm. The lateral spatial resolution of each three-dimensional image 191 to 196 along its I coordinate (in the plane of FIGS. 8 and 10, perpendicular to the plane of FIGS. 7 and 9) is less than or equal to 10 μm. The longitudinal spatial resolution of each three-dimensional image 191 to 196 along its coordinate v (in the plane of Figures 7 and 11, perpendicular to the plane of Figures 8 and 10) is less than 100 nm, ideally less than or equal to 10 nm.
    [0024] The data spatially characterizing the outer surface of the object 5 are: ,, its cylindrical coordinates z), its Cartesian coordinates. Synchronization Synchronization between the following measurements is ensured by the control-command system 10: Circularities in z1 and zz by distance sensors 7 (acquisition of the distance data), and 25 - Acquisition of the three-dimensional images (three spatial dimensions) by the image sensor 151 and / or 152, including the circularity measurement zones The control means 10 comprise at least one interface 30 for controlling and transferring data, for example of the TCPIP type.
    [0025] By contrast, with reference to FIGS. 12 and 13, if the cylindrical portion of the object 5 has an inclination with respect to the direction of the axis of rotation 4, then the object 5 describes a 360 ° cone of revolution. rotating when it explores different positions 38, 39, 40, 41 about the axis 4. It must refocus each section on the axis of rotation 4 to make measurements. There is therefore desynchronization of the measurements between the different measurement planes 81, 82: FIG. 12 illustrates the position of the axis of rotation 4 with respect to the object 5 for the measurements by the sensors 71 in the plane 81; this configuration is obtained by making one or more series (s) of distance measurements by the sensors 71 with a rotation of the object 5 around its axis 4 and minimizing the first order harmonic of the Fourier decomposition sensor readings 71; and Figure 13 illustrates the position of the axis of rotation 4 with respect to the object 5 for measurements by the sensors 72 in the plane 82; this configuration is obtained by making one or more series (s) of distance measurements by the sensors 72 with a rotation of the object 5 around its axis 4 and minimizing the first order harmonic of the Fourier decomposition sensor readings 72. The inclination of the cylindrical portion of the object 5 with respect to the axis of rotation 4 is minimized by manual mechanical means of the rotations around the X and Y axes respectively or by machining. The residual inclination of the cylindrical portion of the object 5 with respect to the axis of rotation 4 is measured by measuring the eccentricity of a circle or contour line 14, 142 of a measurement plane respectively. or 82 when the other circle or contour line 14, 141 of the other measurement plane 25 respectively 82 or 81 is centered. Orientation of three-dimensional images of the same measurement plane between them; correction of the residual inclination and of the "wobble" This method comprises, before assembling the different three-dimensional images of the same measurement plane (respectively 81 or 82), an orientation (in the image reference frame 9), by the means 12, of each three-dimensional image of this measurement plane with respect to the other three-dimensional images of this same measurement plane, this orientation being determined as a function of a variation of inclination of the object 5 by report to image repository 9 when acquiring these different three-dimensional images. This variation of inclination is measured according to two angles of which: an angle around the optical axis 21 of the image sensor 5 (respectively 151 or 152) having acquired these three-dimensional images, and an angle around a axis 22 perpendicular to the axis 21 and substantially perpendicular to the axis of rotation 4 or elongation 20.
    [0026] The procedure is as follows for the correction of the "wobble" (i.e. "oscillation" of the object 5 or the variation of inclination of the object 5 in the reference 9 and / or 16). For each level h, the images ihert of the image sensor located at the height h (respectively sensor 151 for h = z1 and sensor 152 for 15 h = z2) are oriented in space with the inclination of the cylindrical portion of the object 5 and the angular variations of the axis of rotation 4 wx (9) and (cp) calculated from the measurements of the distance sensors 7 with: tg wc)) dr, »- dr, (q))) / (Z2-Zij, the drzi (9.0 being those measured by the distance sensors 7 or calculated from them in the vertical plane containing the optical axis of the image sensor (respectively 151 or 152) in the shooting of index m; tg w, dry) / 1 (A (22 -21 the - being those measured by the distance sensors 7 or calculated from them in the vertical plane perpendicular to the optical axis of the image sensor (respectively 151 or 152) to the Tn. and L index image, the components of the inclination angle of the cylindrical portion of the object 5 relative to the axis of ro 4 in the radial and longitudinal directions of the image sensor (respectively 151 or 152). 3028940 - 29 - The sums of these contributions along these axes are: ax and a- -I- w YYC Each pixel e = I 4, of the image ,,,, undergoes the transformations V i [following: 5 .73 with Rif = 1 1 0 tan has 0 cos ax 1P = Rx.731 with R. ax 0 sin ax cos ax 0 Or then: R1R2Rs.151, the Ri being shear matrices (or "shearing matrices") of angle ay for the respect of the pixels.
    [0027] The following steps describe the procedure at each of the levels z1 and h = zz. From here, the h index is omitted. For the calibration of the images in the coordinate system of the object 5, in order to be in the system (xjyr, z) of the object 5, each image undergoes: cos -1 7-0 cos -ro sin 15 p = R2. p V with Rz - sin cp cos cp, V_ 0 cio 0 0 1 and r0 the nominal radius of the cylinder. The image i is converted into cylindrical coordinates: [The pixel is written as -0 r "=.] Assembling three-dimensional images of the same measurement plane This method comprises, for each measurement plane (respectively 81 or 82 ) having been acquired three-dimensional images 191 to 196, an assembly (by the means 13) of different three-dimensional images acquired for this measurement plane (respectively 81 or 82), so as to obtain three-dimensional data of the contour surface 18 of the object 5 (and possibly all or part of the sample 23), the assembly comprising a definition of relative positions of these different images by means of the data representative of the line of Contour 14 contained in this same measurement plane (respectively 81 or 582) A first definition of the relative positions of the three-dimensional images can be carried out along the Z axis if the height sensor 25 which targets the object. and 5 denotes a variation in the height of the object 5 between the different three-dimensional images acquired.
    [0028] The definition of the relative positions of the three-dimensional images further comprises, in a finer manner, for each three-dimensional image of a measurement plane (respectively 81 or 82), a least squares algorithm minimizing a difference between: the data representative of the contour line 14 of the object 5 contained in this measurement plane (respectively 81 or 82), and - this three-dimensional image of this measurement plane (respectively 81 or 82). Here is more in detail how we proceed. We start with a 2D correlation of three-dimensional images by a pair of successive images of index m and m + 1 (or M and 0): each pair of images and 1, m + im G [0, M - 11 , a level h has a common area that is wedged relative to each other by intercorrelation: the operation is performed on the pixels eu = 0 is calculated such that C the Vdir2 + offset vector i ctin + 1 Zdan + 1 maximum in ((p with: o squ If, offset between Im _1 and I. The closure of the image offsets is calculated: the sum of the offset vectors must be zero: On calculates the cylindrical coordinates of the image pixels: if this sum is non-zero, the residue is compensated for the vectors Vii by integer value of pixels For each image .4 'r .. E [1, M 1], the pixels are corrected in cylindrical coordinates of the offset vector and the possible residual rrei: 1511.1 10 The calibration points resulting from the measurement of circularity are written in the form: wedged in r by com parison of the rc9 f 'points.inc, p common to the image 15 dS zones opposite. The dimension dS corresponds to the integration diameter cb of the distance sensor: (Pdw = & nt On these dS areas centered on the, we average the Tds of the corresponding pixels 20. Ej - r (.7 per image is then minimized to calculate The final coordinates of the image pixels in cylindrical coordinates are: The common areas with two images are averaged in T by pixel with H. E h For the registration of the images on the points 13: each image is then an integer value of pixels A numerical model of the outer surface of a part of interest of the object 5 or of the whole object 5 (possibly with all or part of the sample) is obtained. The set of steps, from the acquisitions of distance data and three-dimensional images to the numerical model (i.e., three-dimensional data of the contour surface 18) of FIG. object 5 and possibly all or part of Sample 23 typically lasts about 15 to 30 minutes.
    [0029] 10 Use of the numerical model and advantages of the device 1 according to the invention and of the method according to the invention implemented by the device 1. It is then possible to take the object 5 and place it for example in an apparatus generating a radiation beam (corpuscular or electromagnetic) or in a Scanning Electron Microscope (SEM) 15 or in any other apparatus. The identification of a key characteristic (for example marking or engraving on the quasi-cylindrical part of the object 5) between a position in this apparatus and this numerical model obtained by assembling the different three-dimensional images 191 to 196 makes it possible to orientate itself freely on object 5, without the use of a metrology object.
    [0030] This numerical model is transferred to another apparatus or as a coordinate system for subsequent assignment of multimodal and multiscale analysis data. This numerical model makes it possible to know the exact shape of the outer surface of a part of interest of the object 5 or of the whole object 25 (with possibly all or part of the sample 23) in order to position this sample. with precision, for example with respect to a radiation beam (corpuscular or electromagnetic). An advantage of the approach according to the invention is to constrain the number of sensors required on the experimental apparatus (for example a line of light or a SEM), leaving more space around the assembly 5, 23 to optimize the solid angle of other detectors, such as for example a fluorescence detector. The combination with optical methods (WLI and focus contrast) is new and allows to develop a digital model faster and more complete. A key advantage of the invention is to save time on experiments: one can find a place of interest on the surface of the assembly 5, 23 without delay, thanks to the 3D digital model. This represents a considerable cost reduction, not only in synchrotron experiments, but also for other types of microscopy or multimodal and multivalent complementary analysis. The invention also makes it possible to automate certain experiments at the level of the areas of interest to be analyzed. Finally, it should be noted that in the device 1: for each plane 81 or 82, the number of three-dimensional images M-1 taken by the image sensor 151 or 152 respectively is less than the number N of measurement points of each sensor. respectively 71 or 72 of this measurement plane to obtain three-dimensional data (ie a numerical model) of a contour surface 18 of the object 5 (and possibly all or part of the sample 23), and / or 20 for each plane 81 or 82, each sensor respectively 71 or 72 has a longitudinal spatial resolution (typically less than or equal to 1 nanometer) for its distance measurement (between an outer surface of the object 5 and this distance sensor) less than the longitudinal spatial resolution (typically less than or equal to 10 nanometers) of the pattern height measurement of the outer surface of the object 5 by the sensor 151 or 152 respectively along the v coordinate, i.e. say the lon g an axis connecting this outer surface to the sensor respectively 151 or 152.
    [0031] According to the invention, the distance data of the sensors 7 are used to separate, with respect to the real profile of the object 5, the errors due to the variation of inclination and / or translation of the axis of rotation. 4. The distance data of the sensors 7 are also used to assemble the three-dimensional images. According to the invention, it is thus possible to gain in time because it is faster to oversample the object accurately with unidimensional distance data from the sensors 7 (which are very fast to acquire) rather than 5. with three-dimensional images of the sensors 151, 152 in order to make the error separation, that is to say to measure the convolution between the shape of the object 5 and the errors of the rotation about the axis 4; in silver, because it is more economical to have at least 3 sensors 10 7 of one-dimensional distance data per plane 81 or 82 rather than at least 3 white light interferometers and / or at least three focus contrast microscopes per plane 81 or 82 to make this separation of errors, and in resolution, because: 15 o one gains in resolution for the separation of errors, the sensors 7 having a better longitudinal spatial resolution than the sensors 151 and 152, and where one wins in resolution for the digital model (which is equivalent to the three-dimensional data of the contour surface 18) of the object 5 and possibly all or part of the sample 23, because instead of assembling the M-1 three-dimensional images 191 to 196 based solely on the points of correspondence between the three-dimensional image pairs 191 to 196, 25 additional registration data are available in the form of the contour line 14 which It can be inexpensively and quickly oversampled with a large number of measuring points, and which is preferably a closed line which avoids or limits assembly inconsistency (or stitching) when after assembled all the images 191 to 196 between them two by two starting from the first image 191 to the last image 196 we end up assembling the last image 196 to the first image 191. Another possible use of the method or device according to the invention described may be to characterize the nanopositioning system 3 used including the rotation means 31 and / or to characterize the vibrational and thermal stability of the nano-positioning system 3. An advantage of the invention is to be able to determine the quality of one or more nano-positioners in a concise and fast manner. This is also interesting for providers of nanopositioning systems.
    [0032] Of course, the invention is not limited to the examples which have just been described and numerous adjustments can be made to these examples without departing from the scope of the invention. In particular: - for a rotation of the object 5 about an axis of rotation 4 with respect to a distance reference 9 in which the distance sensors 7 are fixed, and / or for a rotation of the object 5 around its axis of rotation 4 facing the image sensor 151 or 152 in an image frame 20 in which this image sensor is fixed, the object 5 can be fixed relative to the frame 17 of the device 1 and all the sensors 7 and / or all the sensors 151, 152 can be rotatably mounted about the axis 4 on a means of rotation (rotation stage) common. In addition, embodiments can be provided for more than two measurement planes 81, 82. In addition: measurements by the sensors 71, 151 or 72, 152 of the same measurement plane 81 or 82, and or the measurements by the sensors 71 and 72 of different measurement planes 81 and 82, and / or the measurements by the sensors 151 and 152 of different measurement planes 81 and 82, are preferably synchronized, but this is not the case. is not required. Of course, the various features, shapes, variants and embodiments of the invention may be associated with each other in various combinations to the extent that they are not incompatible or exclusive of each other. In particular all the variants and embodiments described above are combinable with each other.
    权利要求:
    Claims (15)
    [0001]
    REVENDICATIONS1. A method of three-dimensional characterization of an object (5), comprising: a supply of the object (5), a distance data acquisition comprising: o for at least two separate measurement planes (81, 82), each measuring plane being provided with at least three distance sensors (71, 72) surrounding the object, and o for each distance sensor (71; 72) of each measurement plane (81; 82), a measurement of a distance data representative of a distance between an outer surface of the object and this distance sensor (71; 72) measured in the measurement plane (81; 82) of the sensor, a reiteration of the data acquisition of distances for several rotation values of the object about an axis of rotation (4) relative to a distance reference (9) in which the distance sensors (71, 72) are fixed, for each measurement plane ( 81; 82), obtaining data representative of a contour line (14) of the object from the data of di stances measured by all sensors (71; 72) of this measuring plane and for different values of rotation of the object (5) about its axis of rotation (4), the contour line (14) being contained in this measuring plane (81; 82), said obtaining of data representative of a contour line including taking into account a variation of inclination and / or translation of the axis of rotation (4) in the distance repository (9) during data acquisition by distance, for each measuring plane (81,; 82) from at least one of the measurement planes, an acquisition by an image sensor (151; 152) of a three-dimensional image (191) of a face of the object (5), this measurement plane (81; 82) being imaged on this three-dimensional image (191), and a reiteration of this image acquisition (192-196) for several rotation values of the object (5) about its axis of rotation (4) facing said image sensor (151; 152) in an image frame (16) in which the image sensor (151; 152) is fixed, for each measuring plane (81; 82) having been acquired from three-dimensional images (191-196), an assembly of five different three-dimensional images (191-196) acquired for this measurement plane (81; 82), so as to obtain data three-dimensional of a contour surface (18) of the object, the assembly comprising a definition of relative positions of the different images (191-196) by means of the data representative of the contour line (14) contained in this plane measuring (81; 82).
    [0002]
    2. Method according to claim 1, characterized in that the definition of the relative positions of the three-dimensional images comprises, for each three-dimensional image (191; 192; 193; 194; 195; 196) 15 of a measuring plane (81; ), a least squares algorithm minimizing a difference between: - the data representative of the contour line (14) of the object contained in this measurement plane (81; 82), and this three-dimensional image (191; 192; 193); 194; 195; 196) 20 of this measurement plane (81; 82).
    [0003]
    3. Method according to claim 1 or 2, characterized in that it comprises, before the assembly of the different three-dimensional images, an orientation of each three-dimensional image with respect to the other three-dimensional images, this orientation being determined according to a variation of inclination of the object (5) with respect to the image reference (16) during the acquisition of these different three-dimensional images. 30
    [0004]
    4. Method according to any one of the preceding claims, characterized in that the object extends along an axis of elongation (20), the axis of elongation and the axis of rotation (4). forming an angle less than 0.01 radian. 3028940 -39-
    [0005]
    5. Method according to any one of the preceding claims, characterized in that the object is mounted on a support (3) thermally stabilized and mounted in rotation about the axis of rotation (4), the method further comprising a checking the stabilization of a temperature of the object with variations below a temperature difference threshold.
    [0006]
    6. A method according to any one of the preceding claims characterized in that each image sensor comprises a white light interferometer and / or a focus contrast microscope.
    [0007]
    7. Method according to any one of the preceding claims, characterized in that the distance sensors (71, 72) are interferometric sensors and the distance data are interferometric data.
    [0008]
    8. Method according to any one of the preceding claims, characterized in that the distance sensors and the image sensor 20 are integral with the same frame (17), the object being mounted on a plate (31) of displacement arranged for the rotation of the object about the axis of rotation (4) relative to this frame.
    [0009]
    9. A characterization device, comprising: an object zone (2), means (6, 7, 71, 72) for acquiring distance data, said distance data acquisition means being distributed over at least two separate measurement planes (81, 82), each measuring plane (81; 82) being provided with at least three distance sensors (71; 72) surrounding the object area, each distance sensor (71; 72) being arranged to measure in its measuring plane (81; 82) a distance data representative of a distance between: - an outer surface of an object disposed in the object zone (2) being integral with the object zone and this distance sensor (71; 72) and this for different values of rotation of the object zone (2) around an axis of rotation (4) with respect to a reference frame distance (9) in which the distance sensors (71, 72) are fixed, - for each measuring plane (81; 82), means (10) for obtaining data. Representative of a contour line (14) of the object from acquired distance data including distance data measured by all the sensors (71; 72) of this measurement plane (81; 82) and for different values of rotation of the object zone (2) around its axis of rotation (4), this contour line being contained in this measurement plane ( 81; 82), the means for obtaining data representative of a contour line being arranged to take into account a variation of inclination and / or translation of the axis of rotation (4) in the reference frame. at least one of the measurement planes, an image sensor (151; 152) arranged to acquire a three-dimensional image, at a distance (9) when acquiring the distance data, for each measuring plane (81; (191) of a face of the object disposed in the object zone (2), this measurement plane (81; 82) being imaged on this three-dimensional image, the image sensor being arranged to reiterate the image acquisition (192-196) for several rotation values of the object area (2) about its axis of rotation (4) facing said image sensor (151; 2) in an image frame (16) in which the image sensor is fixed, - for each measurement plane (81; 82) of at least one of the 25 measurement planes, means for assembling different three-dimensional images (191-196) acquired for this measurement plane, so as to obtain three-dimensional data of a contour surface (18) of the object, the assembly means being arranged to define the relative positions of the different images (191-196) by means of the data representative of the contour line (14) contained in this measurement plane (81; 82).
    [0010]
    10. Device according to claim 9, characterized in that the assembly means are arranged so that the definition of the relative positions of the three-dimensional images comprises, for each three-dimensional image of a measurement plane, a least-important algorithm. squares minimizing a difference between: the data representative of the contour line of the object 5 contained in this measurement plane, and this three-dimensional image of this measurement plane.
    [0011]
    11. Device according to claim 9 or 10, characterized in that it comprises means for, before an assembly of different three-dimensional images, orienting each three-dimensional image with respect to the other three-dimensional images as a function of a variation of inclination of the object area relative to the image repository when acquiring these different three-dimensional images. 15
    [0012]
    12. Device according to any one of claims 9 to 11, characterized in that it comprises a support for the object area, said support being rotatably mounted about the axis of rotation, said support comprising means for thermal stabilization, the apparatus further comprising means for verifying the stabilization of a temperature of the object area with variations below a temperature difference threshold.
    [0013]
    13. The device according to any of claims 9 to 12, characterized in that each image sensor comprises a white light interferometer and / or a focus contrast microscope.
    [0014]
    14. Device according to any one of claims 9 to 13, characterized in that the distance sensors are interferometric sensors and the distance data are interferometric data. 3028940 -42-
    [0015]
    15. Device according to any one of claims 9 to 14, characterized in that the distance sensors and the image sensor are integral with the same frame, the object area being mounted on a displacement plate arranged to the rotation of the object zone 5 around the axis of rotation relative to this frame. 10
    类似技术:
    公开号 | 公开日 | 专利标题
    EP3221660B1|2018-09-19|Method and device for the three-dimensional characterisation of a surface of an object
    EP3077873B1|2018-02-14|Device and method for positioning a photolithography mask by means of a contactless optical method
    FR3026481A1|2016-04-01|DEVICE AND METHOD FOR SURFACE PROFILOMETRY FOR CONTROLLING WAFERS DURING PROCESS
    WO2011117539A1|2011-09-29|Method and equipment for detecting the presence and extent of defects in an optical component
    EP3069185A1|2016-09-21|Three-dimensional focusing device and method for a microscope
    KR20180021132A|2018-02-28|Interference roll-off measurements using static fringe patterns
    FR2950155A1|2011-03-18|ALIGNMENT METHOD FOR CONTROLLING A MIRROR
    Liu et al.2021|High-speed 3D shape measurement using a rotary mechanical projector
    EP3728990B1|2022-03-02|Three-dimensional target with dual structure, device and method for optical measurement with such a target
    WO2016166035A1|2016-10-20|Modular device for non-contact measurement and corresponding measurement and control system
    EP3728991B1|2022-03-02|Machine tool with optical measurement device for three-dimensional referencing between the tool holder and the workpiece support and corresponding three-dimensional optical measurement method
    CA2198022C|2004-12-28|Method for the correlation of three dimensional measurements obtained by image capturing units and system for carrying out said method
    EP3458896B1|2021-12-22|Micro-localisation method and device for an imaging instrument and a measuring apparatus
    WO2018060359A1|2018-04-05|Method and device for analysing an electromagnetic wave in high definition
    TRỊNH et al.2017|Shearing interference microscope for step‐height measurements
    FR2976068A1|2012-12-07|Method for characterizing modal/service deformations e.g. within plane, of distribution belt of engine, involves determining displacement/deformation of body by triangulation of movement of stereo-pixel between reference time and next time
    FR2976069A1|2012-12-07|Method for characterizing modal/service deflected shapes of belt strand in vehicle engine, involves determining displacement of pixel between reference time and monitoring time to determine displacement or deformation of body
    FR2878951A1|2006-06-09|Rotor alignment measuring method for electricity production machine, involves measuring lateral spacings between laser beam and inner borders of stator by emitting and measuring range of another laser beam up to inner borders of stator
    Cheng et al.2019|Precision enhancement of three-dimensional displacement tracing for nano-fabrication based on low coherence interferometry
    Wang et al.2015|Multi-layer surface profiling using gated wavefront sensing
    FR3058213A1|2018-05-04|DEVICE FOR INSTALLING MEASUREMENTS BY TOMOGRAPHY X.
    EP3724725A1|2020-10-21|Method for calibrating an analysis device, and associated device
    FR2980844A1|2013-04-05|Method for calibrating measuring element, involves calculating length of interval separating centers of targets by considering distance between positions and difference between X-coordinates, and between ordinates
    FR2930818A1|2009-11-06|Three-dimensional shape measurement sensor precision determining method for bearing ring, involves determining precision of sensor corresponding to difference between values obtained by measurement of conformations and calibrated values
    Echter et al.2013|Slope-sensitive optical probe for freeform optics metrology
    同族专利:
    公开号 | 公开日
    ES2702023T3|2019-02-27|
    EP3221660B1|2018-09-19|
    EP3221660A1|2017-09-27|
    WO2016078841A1|2016-05-26|
    FR3028940B1|2016-12-30|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US6205243B1|1996-03-21|2001-03-20|Viewpoint Corp.|System and method for rapid shape digitizing and adaptive mesh generation|
    DE202005018753U1|2005-12-01|2006-03-02|Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.|Measuring device for inspecting geometric quality of railed vehicle`s wheel sets, has profile sensor to measure concentricity deviation of center section of shaft and another sensor to measure concentricity deviation of side piece of shaft|
    DE102006031142A1|2006-07-05|2008-01-10|Prüf- und Forschungsinstitut Pirmasens e.V.|Surface coordinates three dimensional measurement and spatial detection method for e.g. foot ball, involves rotating object so that surface spherical segment is found by sensors, where detection is continued till full surfaces are detected|
    CN103363921B|2013-07-09|2016-01-06|中国工程物理研究院总体工程研究所|A kind of modified three point method turn error, deviation from circular from computing method|PL235302B1|2017-10-11|2020-06-29|Gg Tech W Garus I T Gromek Spolka Jawna|Device for measuring three-dimensional objects|
    PL71289Y1|2017-10-11|2020-03-31|Gg Tech W Garus I T Gromek Spolka Jawna|Device for measuring three-dimensional objects|
    FR3085204A1|2018-08-23|2020-02-28|Fives Ecl|SYSTEM FOR CHARACTERIZING THE GEOMETRY OF A SUSPENDED CHARGE, METHOD USING SUCH A SYSTEM AND INSTALLATION FOR PRODUCING ALUMINUM BY ELECTROLYSIS COMPRISING SUCH A SYSTEM|
    CN112815850A|2021-02-26|2021-05-18|中国工程物理研究院机械制造工艺研究所|Cylinder pose measuring method and device|
    法律状态:
    2015-11-24| PLFP| Fee payment|Year of fee payment: 2 |
    2016-05-27| PLSC| Search report ready|Effective date: 20160527 |
    2016-11-25| PLFP| Fee payment|Year of fee payment: 3 |
    2017-11-27| PLFP| Fee payment|Year of fee payment: 4 |
    2018-11-21| PLFP| Fee payment|Year of fee payment: 5 |
    2020-10-16| ST| Notification of lapse|Effective date: 20200906 |
    优先权:
    申请号 | 申请日 | 专利标题
    FR1461310A|FR3028940B1|2014-11-21|2014-11-21|METHOD AND DEVICE FOR CHARACTERIZING THREE DIMENSIONS OF A SURFACE OF AN OBJECT|FR1461310A| FR3028940B1|2014-11-21|2014-11-21|METHOD AND DEVICE FOR CHARACTERIZING THREE DIMENSIONS OF A SURFACE OF AN OBJECT|
    PCT/EP2015/074011| WO2016078841A1|2014-11-21|2015-10-16|Method and device for the three-dimensional characterisation of a surface of an object|
    EP15787916.4A| EP3221660B1|2014-11-21|2015-10-16|Method and device for the three-dimensional characterisation of a surface of an object|
    ES15787916T| ES2702023T3|2014-11-21|2015-10-16|Procedure and characterization device in three dimensions of a surface of an object|
    [返回顶部]